Introduction to MEMS (3.0 units)
Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
- Crosslist: This course is offered by the AME department but may qualify for major credit in EE. To register, enroll in AME 455.
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