Aerospace and Mechanical Engineering 455:
Introduction to MEMS (3.0 units)
Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
Section | Session | Type | Time | Days | Registered | Instructor | Location | Syllabus | Info |
---|---|---|---|---|---|---|---|---|---|
28861R | 001 | Lecture | 10:00-11:50am | Mon, Wed | 40 of 40 | Hangbo Zhao | KAP163 | PDF (226790 KB) |