Aerospace and Mechanical Engineering 455:

Introduction to MEMS (3.0 units)

Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
    28861R001Lecture10:00-11:50amMon, Wed
    40 of 40
    Hangbo ZhaoKAP163PDF (226790 KB)session dates
    Information accurate as of September 13, 2022 5:00 pm.
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