Electrical and Computer Engineering 415:

Introduction to MEMS (3.0 units)

Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
  • Crosslist: This course is offered by the AME department but may qualify for major credit in EE. To register, enroll in AME 455.
SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
28861R001Lecture9:30-10:50amMon, Wed12 of 40Hangbo ZhaoSOSB2 & ONLINEPDF (211255 KB)session dates
Information accurate as of September 10, 2021 2:03 pm.
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