Aerospace and Mechanical Engineering 455:

Introduction to MEMS (3.0 units)

Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
    SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
    28861R001Lecture9:30-10:50amMon, Wed12 of 40Hangbo ZhaoSOSB2 & ONLINEPDF (211255 KB)session dates
    Information accurate as of September 10, 2021 5:03 pm.
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