Electrical and Computer Engineering 507:

Micro- and Nano-Fabrication Technology (4.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
    SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
    30773R048Lecture2:00-3:50pmMon, Wed38 of 40Wei WuTHH118PDF (297846 KB)session dates
    Information accurate as of January 19, 2024 5:02 pm.