Electrical and Computer Engineering 507:

Micro- and Nano-Fabrication Technology (4.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
    SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
    30773R048Lecture2:00-3:50pmMon, Wed21 of 55Wei WuTHH114PDF (297288 KB)session dates
    Information accurate as of February 7, 2022 7:48 am.