Materials Science 507:

Micro- and Nano-Fabrication Technology (4.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.
  • Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 507.
SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
30773D048Lecture2:00-3:50pmMon, Wed11 of 55Wei WuTHH212 & ONLINEfeesession datesbook list
Information accurate as of September 23, 2020 1:00 pm.
The Fall 2020 semester will begin with fully remote instruction, with limited exceptions for clinical education. Faculty will contact students to provide information to login to classes. Read more.