Microelectromechanical Systems (3.0 units)
Exploration of the technology methods and physical principles of MEMS, and survey various MEMS of current interest.
30881R | 073 | Lecture | 9:00-11:50am | Friday | 5 of 20 | Eun Kim | ONLINE | PDF (463311 KB) | |
Information accurate as of September 23, 2020 1:00 pm.