Materials Science 507:

Micro- and Nano-Fabrication Technology (3.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
  • Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 507.
30580R048Lecture2:00-3:20pmMon, Wed28 of 50Wei WuVKC150feesession dates
Information accurate as of September 23, 2020 11:00 am.
The Fall 2020 semester will begin with fully remote instruction, with limited exceptions for clinical education. Faculty will contact students to provide information to login to classes. Read more.