Introduction to MEMS (3.0 units)
Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
- Crosslist: This course is offered by the AME department but may qualify for major credit in EE. To register, enroll in AME 455.
|28861R||001||Lecture||9:30-10:50am||Mon, Wed||24 of 30||Hangbo Zhao||VPDLL101||PDF (212485 KB)|