The Fall 2020 semester will begin with fully remote instruction, with limited exceptions for clinical education. Faculty will contact students to provide information to login to classes. Read more.

Electrical and Computer Engineering 415:

Introduction to MEMS (3.0 units)

Introduction to micro-electro-opto-mechanical systems; scaling effects on material properties, fluid flows, dynamical behavior; fabrication methods; design considerations for MEMS sensors and actuators. Recommended preparation: AME 301, AME 309 and AME 310
  • Crosslist: This course is offered by the AME department but may qualify for major credit in EE. To register, enroll in AME 455.
SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
28861R001Lecture9:30-10:50amMon, Wed24 of 30Hangbo ZhaoVPDLL101PDF (212485 KB)session dates
Information accurate as of September 23, 2020 11:00 am.