Materials Science 507:

Micro- and Nano-Fabrication Technology (3.0 units)

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; patterntransfer methods.
  • Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 507.
SectionSessionTypeTimeDaysRegisteredInstructorLocationSyllabusInfo
30580D048Lecture2:00-3:20pmMon, Wed42 of 50Wei WuVKC150feesession datesbook list
Information accurate as of January 29, 2019 5:49 pm.