Materials Science 508:
Nano-Fabrication Lithography (3.0 units)
Physical basis of lithography methods for nano-scale devices. Photon-, electron-, and ion-based systems, advanced processes; resolution enhancement techniques; directed self assembly.
- Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 508.
|30772R||048||Lecture||2:00-3:20pm||Mon, Wed||20 of 55||Wei Wu||VKC152||PDF (89934 KB)|