Materials Science 508:

Nano-Fabrication Lithography (3.0 units)

Physical basis of lithography methods for nano-scale devices. Photon-, electron-, and ion-based systems, advanced processes; resolution enhancement techniques; directed self assembly.
  • Crosslist: This course is offered by the EE department but may qualify for major credit in MASC. To register, enroll in EE 508.
30772R048Lecture2:00-3:20pmMon, Wed20 of 55Wei WuVKC152PDF (89934 KB)feesession datesbook list
Information accurate as of October 10, 2019 11:02 am.